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Czochralski-Grown Monocrystalline Silicon Tube
- Mono Silicon Tube
Monocrystalline silicon tubes, fabricated using the Czochralski (CZ) method, are critical components in semiconductor manufacturing furnaces. These tubes are renowned for their ultra-high purity (≥99.9999%) and defect-free crystalline structure, ensuring minimal contamination during high-temperature processes like oxidation, diffusion, and epitaxial growth. Unlike polycrystalline or quartz alternatives, monocrystalline silicon tubes exhibit superior thermal stability, maintaining dimensional integrity at temperatures up to 1,200°C while resisting thermal shock.
 
The CZ-grown monocrystalline silicon tubes are designed to withstand corrosive gases (e.g., HF, Cl₂) and extreme thermal cycling, making them ideal for advanced semiconductor applications. Their low oxygen and carbon content (≤9×10¹⁷ atoms/cm³ and ≤3×10¹⁶ atoms/cm³, respectively) minimizes dopant interference, ensuring precise control over device characteristics. For instance, in oxidation furnaces, these tubes enable the growth of uniform silicon dioxide layers on wafers, a process vital for transistor insulation and dielectric formation.
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- Poly Silicon Tube

Polycrystalline silicon tubes are high-performance ceramic components widely used in semiconductor manufacturing and vacuum processing industries. These tubes are engineered with high purity (99.9999%) and superior thermal stability (withstanding temperatures up to 1200°C), making them ideal for critical applications such as exhaust ring blank materials and semiconductor etching components.

In the semiconductor industry, polycrystalline silicon tubes are used for wafer processing and thin – film deposition. In the solar energy field, they play a crucial role in the manufacturing of solar cells. With customizable sizes and shapes, polycrystalline silicon tubes can meet different application requirements, providing reliable solutions for modern industrial production.

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High - purity polycrystalline silicon ring ingot,Dry etching application of polycrystalline silicon ring ingot
Semiconductor-Grade Silicon Tubing
- Silicon Lined Tube
Silicon Lined Tubes are critical components in industries requiring ultra-high purity, such as semiconductor fabrication, pharmaceutical production, and advanced chemical processing. These tubes utilize high-purity silicon (up to 99.9999%) as an inner lining material, which acts as an inert barrier to prevent contamination from external pollutants or chemical interactions.
  • Semiconductor Industry: Used in gas delivery systems and etching equipment to prevent wafer contamination.
  • Pharmaceuticals: Ensures sterile conditions during drug formulation and bioprocessing.
  • Research Labs: Critical for analytical instruments requiring contamination-free sample handling.
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Si Material
Si Material
Si Material
Si Target
Si Material
Si Part
Si Material
Si Ring
Si Material
Si Shaped
Si Material
Si Wafer
Si Material
Si Optical
Si Material
Quartz Part