Provide One-stop Solutions For Si Materials
Silicon Exhaust Ring is a critical component in semiconductor dry etch equipment, serving as the primary pathway for introducing and distributing etch gases into the reaction chamber. Designed with high-purity silicon for exceptional corrosion resistance and thermal stability, it ensures uniform gas flow and precise control during the wafer etching process. By maintaining vacuum integrity and regulating gas dynamics, the silicon exhaust ring directly impacts etch uniformity and process efficiency, making it indispensable in advanced semiconductor manufacturing for achieving high-precision patterns on wafers.
Technical Parameters
| No. | Characteristic | Unit | Spec |
|---|---|---|---|
| 1 | Purity | % | ＞6N |
| 2 | Material | / | Mono / Poly |
| 3 | Diameter scale | mm | 0~600 / Customizable |
| 4 | Type/Contains | / | P type/ N type |
| 5 | Resistivity | Ω•cm3 | <0.02 / 1~4 / 60~90 |
| 6 | Crystal Orientation | / | (100)、(111)、(110) |
| 7 | Dopant | / | B、P、Ga、As、Sb |
| 8 | Surface treatment | / | Polishing |
Technical Advantages
High-Purity Silicon Material：Engineered with ultra-high-purity silicon for superior corrosion resistance and extended lifespan in aggressive plasma environments.
Precision Gas Flow Control：Optimized design ensures uniform gas distribution, enhancing etch uniformity and reducing wafer defects.
Exceptional Thermal Stability：Withstands extreme temperatures (up to 600°C) without deformation, ensuring reliability in high-power dry etch processes.
Vacuum Integrity Assurance：Advanced sealing technology maintains ultra-high vacuum (UHV) conditions, critical for consistent plasma etching performance.
Compatibility with Advanced Nodes：Supports sub-7nm semiconductor manufacturing, enabling high-precision pattern transfer for next-gen logic and memory devices.
Low Maintenance & High Durability：Robust construction minimizes particle generation and downtime, reducing total cost of ownership (TCO).
Industry-Standard Compliance：Meets SEMI and ISO cleanroom standards, ensuring seamless integration into global semiconductor production lines.