Provide One-stop Solutions For Si Materials
Home / Products / Si Optical / Silicon Galvanometer
Silicon galvanometer mirrors are advanced optical components engineered for high-speed laser beam manipulation in industrial, medical, and research applications. Constructed from high-purity monocrystalline silicon, these mirrors offer exceptional thermal stability and lightweight performance, making them ideal for dynamic scanning systems. With reflective coatings optimized for wavelengths ranging from 1.0 to 12.0 µm (e.g., 1064 nm Nd:YAG and 10.6 µm CO₂ lasers), they achieve >99% reflectivity and low wavefront error (λ/8 flatness). Their precision-machined surfaces and low inertia design enable rapid angular responses (sub-millisecond step times) and high resonant frequencies, critical for laser marking, 3D printing, and lidar applications. Key advantages include resistance to thermal distortion, compatibility with extreme environments, and customizable geometries for OEM integration. Silicon galvo mirrors are widely used in laser material processing, medical imaging, and aerospace systems, where their combination of speed, accuracy, and durability outperforms traditional glass or metal alternatives.
Technical Parameters
| Optical Properties | |
| Transmission Range | 1.2-15μm |
| Refractive Index | 3.41776%@10μm |
| Reflection Loss | 46.1%@10μm |
| Structure | Single crystal,synthetic |
| Cleavage Planes | <111> |
| Physical Properties | |
| Density[g/cm3] | 2.33 |
| Melting Point [℃] | 1414 |
| ThermalConductivity [W/(m×K)] | 163 @ 313K |
| Thermal Expansion [10-6/K] | 2.6 @ 293K |
| Knoop Hardness [kg/mm2] | 1100 |
| Specific Heat Capacity [J/(kg×K)] | 712.8 |
| Dielectric Constant | 13 @f= 9.37GHz |
| Young’s Modulus (E) [GPa] | 130.91 |
| Shear Modulus(G) [GPa] | 79.92 |
| Bulk modulus(K) [GPa] | 101.97 |
| Poisson Coefficient | 0.266 |
| Chemical Properties | |
| Solubility / g/L | None |
| Molecular Weight / g/mol | 28.09 |
| Project | Specification |
|---|---|
| Size range | 2-300mm |
| Thickness | 0.12-60mm |
| Finish | 80-50，60-40，40-20，20-10，10-5 |
| Face | λ/2，λ/4，λ/8，λ/10 |
| Parallelism | <3'-30” |
| Clear aperture | >90% |
Technical Advantages
Ultra-High-Speed Response：Microsecond-level angular deflection (up to 10 kHz frequency)* enables real-time laser beam steering for LiDAR and precision manufacturing.
Sub-Micron Precision Control：Nanoscale mirror surface flatness (<λ/10) and repeatable positioning accuracy* ensure stable performance in optical communication and AR/VR systems.
Low Power Consumption：Energy-efficient MEMS actuation technology (<50 mW)* minimizes heat generation, ideal for portable medical devices and IoT sensors.
Robust Thermal Stability：Silicon-based material with ±0.01% drift over -40°C to 85°C* guarantees reliability in harsh environments, critical for aerospace and automotive applications.”
Compact and Scalable Design：Monolithic integration (chip size <5x5mm) supports mass production and seamless embedding in miniaturized optical systems.
Adaptive Multi-Application Compatibility：Customizable resonant/non-resonant modes cater to diverse needs from biomedical imaging to industrial laser marking.