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fused quartz wafer

Quartz wafers are categorized into two primary types: single-crystal quartz (synthetic quartz crystal) and fused quartz (amorphous silica). Single-crystal quartz wafers, grown through advanced hydrothermal synthesis, offer exceptional crystalline uniformity and anisotropic properties, making them ideal for high-frequency SAW/BAW filters, piezoelectric sensors, and quantum computing components.

 

In contrast, fused quartz wafers are manufactured by melting ultra-pure silica into a non-crystalline form, renowned for isotropic thermal stability, near-zero thermal expansion, and UV transparency. These wafers dominate applications like photolithography masks, deep-UV laser optics, and semiconductor process chambers, where extreme heat resistance and optical precision are critical.

Technical Parameters

Diameter2″3″4″5″6″8″
Thickness (um)Depends on Request
MaterialFused Silica
Grade/BrandJGS2/JGS1/JGS3
Surface FinishedDSP/SSP
TTV (um)<8<10<10<10<15<20
Bow/Warp (um)<30<30<40<40<60<60
Ra (nm)<1
S/D (um)40/20
High-Purity Quartz Wafer
single-crystal quartz wafer
MechanicalUnits of MeasureSI/Metric(Imperial)
Densitygm/cc (lb/ft3)2.2-137.4
Porosity% (%)00
Colorclear
Flexural StrengthMPa (lb/in2x103)
Elastic ModulusGPa (lb/in2x106)73-10.6
Shear ModulusGPa (lb/in2x106)31-4.5
Bulk ModulusGPa (lb/in2x106)41-6
Poisson’s Ratio0.17-0.17
Compressive StrengthMPa (lb/in2x103)1108-160.7
HardnessKg/mm2600
Fracture Toughness KICMPa•m1/2
Maximum Use Temperature (no load)°C (°F)1100-2000
    
Thermal   
Thermal ConductivityW/m•°K (BTU•in/ft2•hr•°F)1.38-9.6
Coefficient of Thermal Expansion10–6/°C (10–6/°F)0.55-0.31
Specific HeatJ/Kg•°K (Btu/lb•°F)740-0.18
Electrical   
Dielectric Strengthac-kv/mm (volts/mil)30-750
Dielectric Constant@ 1 MHz3.82-3.82
Dissipation Factor@ 1 MHz0.00002-0.00002
Loss Tangent@ 1 MHz
Volume Resistivityohm•cm>1010

Technical Advantages

  1. Superior Thermal Stability:Engineered with ultra-low thermal expansion (<5×10⁻⁷/°C), our quartz wafers maintain dimensional integrity even in extreme temperature cycles (up to 1200°C), ensuring reliability in high-power semiconductor processes and space-grade electronics.

  2. Nanometer-Level Precision:Advanced polishing technology achieves sub-nanometer surface roughness (Ra ≤0.5nm), critical for EUV photolithography masks and MEMS sensor fabrication, minimizing signal loss and enhancing device yield.

  3. Optical & UV Transparency:With >90% transmittance in deep-UV spectrum (190-250nm), fused quartz wafers enable cutting-edge excimer laser optics and DUV lithography systems, accelerating breakthroughs in chip miniaturization.

  4. Piezoelectric Excellence:Single-crystal quartz wafers deliver unmatched frequency stability (Q-factor >10⁶), powering 5G/6G SAW filters and ultra-precise atomic force microscopy (AFM) probes.

  5. Chemically Inert & Contamination-Free:High-purity SiO₂ (99.9999%) ensures zero outgassing and resistance to acids/plasma, ideal for semiconductor etching chambers and biomedical MEMS devices.

  6. Customized Scalability:From 100mm to 450mm wafer diameters, our flexible manufacturing supports quantum computing substrates to aerospace sensor arrays, backed by ISO-certified cleanroom production.